Development of a smart nanorobot for sensor-based handling in a scanning electron microscope

Keywords: nano robot, scanning electron microscope, nano handling, microassembly

For many applications it is necessary to handle (to grasp, adjust, transport, position, release, fix, etc.) objects with an accuracy in sub-micrometer ranges. The only solution is often the use of a nanohandling station with powerful sensory support delivering by an SEM (Scanning Electron Microscope). The goal of the project is to develop a smart nano handling robot system for a desktop SEM station, with a powerful sensory support and very high flexibility. Microassembly, nanotesting and functional and pharmaco genomics are the main application fields of the project. The objective of the HUT is to organize the development of the control system, and to develop simulation methods for the nano handling tasks in SEM

Publications

• Veikko Sariola, Petteri Korhonen, Petri Hänninen, Heikki Koivo, Pasi Kallio, Pekka Ronkanen and Mariaana Savia,
  "Microrobotic activities in Finland,"
  in Proc. The IARP-IEEE/RAS-EURON Joint Workshop on MICRO & NANO ROBOTICS, Paris, France, 23-24 October 2006, Paris, France: IARP; IEEE/RAS; EURON, 2006, p. 6.
  Electronic publication
• Mariaana Savia, Quan Zhou and Heikki N Koivo,
  "Simulating adhesion forces between arbitrarily shaped objects in micro/nano-handling operations,"
  in Proceedings of 2004 IEEE/RSJ International Conference on Intelligent Robots and Systems, Sendai, Japan: IEEE/RSJ, 2004, 6 pp.
• Bo Chang, Heikki N Koivo and Quan Zhou,
  "Experimental study of microforces in a controlled environment,"
  in Proceedings MICRO.tec 2003 - 2nd VDE World Microtechnologies Congress, Berlin, Germany: VDE Verlag GMBH, 2003, pp. 89-94.