Hybrid ultra precision manufacturing process based on positional- and self-assembly for complex micro-products

Keywords: Microrobotics, Self-assembly, Microassembly
Research area: Micro- and Nanorobotics

The aim of the project is to develop a new versatile 3D automated production system with a positioning accuracy of 100 nm for complex micro-devices. Based on ultra precision robots improved by the innovative knowledge-based self-assembly technology, this combination will participate in the massive production of high-added value strategic and emerging micro-products.

Hybrid Handling Platform

Tasks at TKK:

• Development of a hybrid microassembly process combining microgripper and droplet self-alignment
• Development of new gripping technologies based on droplet self-alignment and electrowetting
• Study of temperature and humidity influences on the new technologies
• Automation of the new processes and demonstrations in inspection of optoelectronics

Hydromel is funded by EU under FP6. The project includes over 20 research partners from 9 different countries.

People

• Quan Zhou
• Veikko Sariola
• Mirva Keski-Jyrä

Publications

• Bo Chang, Iiris Routa, Veikko Sariola and Quan Zhou,
  "Self-alignment of RFID dies on four-pad patterns with water droplet for sparse self-assembly,"
  Journal of Micromechanics and Microengineering, Vol. 21, no. 9, 12 pp, 2011.
  Electronic publication
• Bo Chang, Veikko Sariola, Mirva Jääskeläinen and Quan Zhou,
  "Self-alignment in the stacking of microchips with mist-induced water droplets,"
  Journal of Micromechanics and Microengineering, Vol. 21, no. 1, 11 pp, 2011.
  Electronic publication
• Gert-willem Römer, Mark Jorritsma, Daniel Arnaldo Del Cerro, Bert Huis in ‘t Veld, Bo Chang, Ville Liimatainen and Quan Zhou,
  "Laser micro-machining of hydrophobic-hydrophilic patterns for fluid driven self-alignment in micro-assembly,"
  in Proceedings of LPM2011, Takamatsu, Kagawa, Japan: JLPS - Japan Laser Processing Society, 2011, 10 pp.
• Veikko Sariola, Ville Liimatainen, Tatu Tolonen, Reidar Udd and Quan Zhou,
  "Silicon capillary gripper with self-alignment capability,"
  in 2011 IEEE International Conference on Robotics and Automation - Better Robots, Better Life - Conference DVD, Shanghai, China: IEEE, 2011, pp. 4098-4103.
• Quan Zhou,
  "Impact of ambient environment on micro interactions,"
  in 2011 IEEE International Conference on Robotics and Automation (ICRA 2011) - Workshops and Tutorials CD, Shanghai, China: IEEE, 2011, 5 pp.
• Quan Zhou,
  "Microsystems integration using robotics and self-assembly,"
  in Automaatio XIX SEMINAARI 15.-16.3.2011, Arto Visala (toim.), Helsinki: Suomen Automaatioseura ry, 2011, 6 pp.
  Electronic publication
• Quan Zhou, Veikko Sariola, Bo Chang and Iiris Routa,
  "Three dimensional hybrid microassembly combining robotic microhandling and selfassembly,"
  in 2011 IEEE International Conference on Robotics and Automation - Better Robots, Better Life - Workshops and Tutorials CD, Shanghai, China: IEEE, 2011, 7 pp.
• Bo Chang, Mirva Jääskeläinen and Quan Zhou,
  "Hybrid micro assembly of microchips on segmented patterns,"
  in Proceedings of the 2010 IEEE Conference on Automation Science and Engineering, Toronto, Canada: IEEE, 2010, pp. 15-20.
• Bo Chang, Mirva Jääskeläinen and Quan Zhou,
  "Microassembly combining pick-and-place and water mist,"
  in MHS2010 & Micro-Nano Global COE, Nagoya, Japan: IEEE, 2010, pp. 333-337.
• Veikko Sariola, Mirva Jääskeläinen and Quan Zhou,
  "Hybrid microassembly combining robotics and water droplet self-alignment,"
  IEEE Transactions on Robotics, Vol. 26, no. 6, pp. 965-977, 2010.
  Electronic publication
• Quan Zhou and Veikko Sariola,
  "Unified view of robotic microhandling and selfassembly,"
  in Robotic microassembly, Michaël Gauthier and Stéphane Regnier (eds.), New Jersey; Canada: Wiley-IEEE Press, 2010, pp. 109-143.
• Mirva Jääskeläinen, Veikko Sariola and Quan Zhou,
  "Environmental effects on droplet self-alignment assisted hybrid microassembly,"
  in IEEE ISAM 2009 Proceedings, Suwon, Korea: IEEE, 2009, pp. 177-182.
• Pierre Lambert and Quan Zhou,
  "Fluidic assembly and capillary forces: modelling, experiments and case studies,"
  in SMART SYSTEMS INTEGRATION 2009, Brussels, Belgium: AKA Verlag, Heidelberg, 2009, 8 pp.
• Mariaana Savia and Heikki N Koivo,
  "Contact micromanipulation - Survey of strategies,"
  IEEE/ASME Transactions on Mechatronics, Vol. 14, no. 4, pp. 504-514, 2009.
  Electronic publication
• Veikko Sariola, Quan Zhou and Heikki N Koivo,
  "Hybrid microhandling: a unified view of robotic handling and self-assembly,"
  Journal of Micro-Nano Mechatronics, Vol. 4, no. 1-2, 12 pp, 2008.
• Veikko Sariola, Quan Zhou, Ralf Laaß and Heikki N Koivo,
  "Experimental study on droplet based hybrid microhandling using high speed camera,"
  in 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems - Conference Proceedings, Raja Chatila, Alonzo Kelly and Jean-Pierre Merlet (eds.), Nice, France: IEEE, 2008, pp. 919-924.
• Quan Zhou and Veikko Sariola,
  "Automation software architectures for robotic microhandling,"
  in IWMF'08 Proceedings, Evanston, IL, USA: Northwestern University, 2008, 5 pp.
• Pou Liu, Kalle Kantola, Toshio Fukuda and Fumihito Arai,
  "Nanorobotic manipulator assisted assembly of complex nanostructures based on carbon nanotubes,"
  in Proceedings of ICRA'07, Seth Hutchinson (ed.), Roma, Italy: IEEE, 2007, 6 pp.
• Quan Zhou, Veikko Sariola and Heikki N Koivo,
  "Microhandling strategies for automation,"
  in 2007 IEEE/RSJ International Conference on Intelligent Robots and Systems - Workshops and Tutorials CD, San Diego, USA: IEEE, 2007, 10 pp.
• Veikko Sariola, Petteri Korhonen, Petri Hänninen, Heikki Koivo, Pasi Kallio, Pekka Ronkanen and Mariaana Savia,
  "Microrobotic activities in Finland,"
  in Proc. The IARP-IEEE/RAS-EURON Joint Workshop on MICRO & NANO ROBOTICS, Paris, France, 23-24 October 2006, Paris, France: IARP; IEEE/RAS; EURON, 2006, p. 6.
  Electronic publication

• Sariola, V., Zhou, Q., Koivo, H.N.,
  “Hybrid microhandling: a unified view of robotic manipulation and self-assembly”,
  Journal of Micro-Nano Mechatronics, 2008.
• Sariola, V., Zhou, Q., Lass, R., Koivo, H.N.,
  “Experimental study on droplet based hybrid microhandling using high speed camera”,
  to be published in 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS’2008, Nice, France, 2008.
• Zhou, Q.,
  “Strategies in Automatic Microhandling”,
  in Proc. 2007 IEEE International Conference on Mechatronics and Automation, ICMA’2007, Haerbin, China, August 05-09, 2007, pp. 69-75, 2007.